Preferred Orientation Controlled Giant Grain Growth of Platinum Thin Films on SiO_2/Si Substrates
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-01-15
著者
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Kim S‐h
Prowtech Inc. Chungbuk Kor
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LEE Dong-Su
Inostek, Inc,
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PARK Dong-Yeon
Inostek, Inc
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WOO Hyun-Jung
Inostek, Inc
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KIN Seung-Hyun
Inostek, Inc
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HA Jowoong
Inostek, Inc
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YOON Euijoon
Inostek, Inc
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Park D‐y
R&d Center Inostek Inc.
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Ha Jowoong
Inostek Inc.
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Lee D‐s
Inostek Inc. Seoul Kor
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Park Dong-yeon
Inostek Inc.
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Lee Dong-su
Inostek Inc
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Kang S‐g
Div. Of Mat. Sci. And Eng. Han Yang Univ
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Woo Hyun-jung
Inostek Inc
関連論文
- Characterization of Sol-Gel Multicoated Thick Pb(Zr_,Ti_)O_3 Films on Platinized Silicon Substrates for Microdevices Applications
- Thickness Effects on the Pyroelectric Properties of Chemical-Solution-Derived Pb(Zr_0.3,Ti_0.7)O_3 Thin Films for the Infra-Red Sensor Devices
- Preferred Orientation Controlled Giant Grain Growth of Platinum Thin Films on SiO_2/Si Substrates
- Dielectric and Electromechanical Properties of Pb(Zr,Ti)O_3 Thin Films for Piezo-Microelectromechanical System Devices
- Preparation of Modified Lead Zinc Niobate Compound Thick Films by Rapid Quenching
- Effects of the Microstructure of Platinum Electrode on the Oxidation Behavior of TiN Diffusion Barrier Layer
- Synthesis and Properties of (1-x)PZN-xBZN Solid-Solution Compounds by Liquid-Evaporation Method ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Effects of the Microstructure of Platinum Electrode on the Oxidation Behavior of TiN Diffusion Barrier Layer