Characterization of Sol-Gel Multicoated Thick Pb(Zr_<0.52>,Ti_<0.48>)O_3 Films on Platinized Silicon Substrates for Microdevices Applications
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概要
- 論文の詳細を見る
- 2003-12-15
著者
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Kim S‐h
Prowtech Inc. Chungbuk Kor
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PARK Joon-Shik
Nano Mechatronics Research Center, Korea Electronics Technology Institute
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KIM Seung-Hyun
R & D Center, Inostek Inc.
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PARK Hyo-Derk
Nano Mechnatronics Research Center, Korea Electronics Technology Institute
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HA Jowoong
R & D Center, Inostek Inc.
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KANG Sung-Goon
Division of Materials Science and Engineering, Han Yang University
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Ha Jowoong
R&d Center Inostek Inc.
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Park Joon-shik
Nano Mechatronics Research Center Korea Electronics Technology Insitute
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Kang S‐g
Div. Of Mat. Sci. And Eng. Han Yang Univ
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Park Hyo-derk
Nano Mechnatronics Research Center Korea Electronics Technology Institute
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Park Joon-Shik
NanoMechatronics Research Center, Korea Electronics Technology Institute, 455-6, Masan-ri, Jinwi-myo
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Park Hyo-Derk
NanoMechatronics Research Center, Korea Electronics Technology Institute, 455-6, Masan-ri, Jinwi-myo
関連論文
- Characterization of Sol-Gel Multicoated Thick Pb(Zr_,Ti_)O_3 Films on Platinized Silicon Substrates for Microdevices Applications
- Thickness Effects on the Pyroelectric Properties of Chemical-Solution-Derived Pb(Zr_0.3,Ti_0.7)O_3 Thin Films for the Infra-Red Sensor Devices
- Preferred Orientation Controlled Giant Grain Growth of Platinum Thin Films on SiO_2/Si Substrates
- Dielectric and Electromechanical Properties of Pb(Zr,Ti)O_3 Thin Films for Piezo-Microelectromechanical System Devices
- Preparation of Modified Lead Zinc Niobate Compound Thick Films by Rapid Quenching
- Synthesis and Properties of (1-x)PZN-xBZN Solid-Solution Compounds by Liquid-Evaporation Method ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)