Optimum TiSi_2 Ohmic Contact Process for Sub-100nm Devices
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
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Moon Kwang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Moon Joo
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Moon Joo
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Moon Joo
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chung U
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chung U
Process Development Team Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Sang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd
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Lee S
Plate Rod & Welding Research Team Technical Research Labs. Posco
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Lee Sang
Department Of Chemistry Kwangwoon University
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PARK Hee
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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LEE Jong
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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PARK Jea
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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KANG Sang
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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CHOI Gil
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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Lee Jong
Process Development Team Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Jong
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Park Hee
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Park Jea
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Choi G
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Choi Gil
Process Development Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Sang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Sang
Process Development 2 Semiconductor R&d Center Samsung Electronics
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