Laser-induced Epitaxial Growth (LEG) Technology for High Density 3-D Stacked Memory with High Productivity
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概要
- 論文の詳細を見る
LEG (Laser-induced Epitaxial Growth) process has been proposed to obtain the single c-Si layer over oxide and successfully demonstrated with cell-stacked high density SRAM. With LEG process, the energy density of laser beam and the seed formation are the key factors to determine the crystal quality of Si layer on oxide. CMOSFETs on Si film prepared by LEG process have excellent behaviors in terms of both performance and its variations. It is found that high density LEG SRAMs with stacked cell transistor have fully worked with the lowest stand-by current of less than 0.3uA/Mb to date. LEG process is believed to be a promising technology for providing the high quality Si channel layer to the stacked memory devices.
- 社団法人電子情報通信学会の論文
- 2007-06-18
著者
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Moon J‐t
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Moon Joo-tae
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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CHUNG U-In
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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Lee Jong-Wook
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Moon Joo
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Moon Joo
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Lee Jae-mun
Division Of Hematolgoy Catholic Hematopoietic Stem Cell Transplantation Center College Of Medicine T
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Lee Jong-wook
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Lee Jong-wook
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Chung U‐i
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Chung U-in
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Chung U-in
Semiconductor R & D Center Samsung Electronics Co.ltd.
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Son Yong-Hoon
Process Development Team, Memory Division, Samsung Electronics Co., Ltd.
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Kang Pilkyu
Process Development Team, Memory Division, Samsung Electronics Co., Ltd.
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Kang Pilkyu
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Son Yong-hoon
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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