Innovative Al Damascene Process for Nanoscale Interconnects
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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KIM Sung-Tae
Process Development Team, Semiconductor R&D Division, Samsung Electronics Co., Ltd.
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Kim Sung-tae
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Moon Joo
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Moon Joo
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Moon Joo
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chung U
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chung U
Process Development Team Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Sang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd
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Kim Dae-yong
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee S
Plate Rod & Welding Research Team Technical Research Labs. Posco
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Lee Sang
Department Of Chemistry Kwangwoon University
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CHOI Kyung
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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HAN Sung
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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YUN Sera
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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HONG Jong
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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KIM Byung
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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Yun Sera
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim Byung
Process Development Team Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Kim Byung
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Sang
Process Development 2 Semiconductor R&d Center Samsung Electronics
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Hong Jong
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Han Sung
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Choi Kyung
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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