Plasma-Assisted Dry Etching of Ferroelectric Capacitor Modules and Application to a 32M Ferroelectric Random Access Memory Devices with Submicron Feature Sizes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Moon J‐t
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Moon Joo-tae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Moon Joo-tae
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Seo Jung-suk
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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LEE Sang-Woo
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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JOO Suk-Ho
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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CHO Sung
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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SON Yoon-Ho
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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LEE Kyu-Mann
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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NAM Sang-Don
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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PARK Kun-Sang
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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LEE Yong-Tak
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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KIM Young-Dae
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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AN Hyeong-Geun
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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KIM Hyoung-Joon
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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JUNG Yong-Ju
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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HEO Jang-Eun
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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LEE Moon-Sook
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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PARK Soon-Oh
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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CHUNG U-In
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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Chung U-in
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Park Soon-oh
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Son Yoon-ho
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Kim Young-dae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Kim Young-dae
Department Of Chemistry Hanyang University
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Heo Jang-eun
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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An Hyeong-geun
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee K‐m
Hynix Semiconductor Co. Choongbuk Kor
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Nam Sang-don
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Moon Joo
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Moon Joo-tae
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Jung Yong-joo
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Chung U-in
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Joo Suk-ho
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Yong-tak
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee S‐w
Samsung Electronics Gyeonggi‐do Kor
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Cho Sung-lae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Park Kun-sang
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Moon-sook
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Moon-sook
Process Development Team Samsung Electronics
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Lee M‐s
Department Of Electronic Engineering National Kaohsiung University Of Applied Sciences. Kaohsiung Ta
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Lee Kyu-mann
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Park Ki-seon
Memory R & D Division Hyundai Electronics Industries Co. Ltd.
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Kim Hyoung-joon
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Sang-woo
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee S‐w
Samsung Electronic Co. Ltd. Kyunggi‐do Kor
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CHUNG U-In
Process Development Team, Semiconductor R&D Division, Samsung Electronics Co. Ltd.
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Jung Yong-Ju
Process Development Team, Semiconductor R&D Division, Samsung Electronics Co., Ltd., San #24, Nongseo-Dong, Giheung-Gu, Yongin-City, Gyeonggi-Do 449-711, Korea
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