LEE Moon-Sook | Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.

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著作論文

Plasma-Assisted Dry Etching of Ferroelectric Capacitor Modules and Application to a 32M Ferroelectric Random Access Memory Devices with Submicron Feature Sizes
Integration of Ferroelectric Random Access Memory Devices with Ir/IrO_2/Pb(Zr_xTi_)O^^_3/Ir Capacitors Formed by Metalorganic Chemical Vapor Deposition-Grown Pb(Zr_xTi_)O_3
Enhanced Retention Characteristics of Pb(Zr, Ti)O_3 Capacitors by Ozone Treatment : Electrical Properties of Condensed Matter
Liquid Delivery Metal-Organic Chemical Vapor Deposition of Pb(Zr_xTi_)O_3 Thin Films for High-Density Ferroelectric Random Access Memory Application

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