SON Yoon-Ho | Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
スポンサーリンク
概要
関連著者
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Moon J‐t
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Moon Joo-tae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Moon Joo-tae
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Seo Jung-suk
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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LEE Sang-Woo
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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JOO Suk-Ho
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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SON Yoon-Ho
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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LEE Kyu-Mann
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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NAM Sang-Don
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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PARK Kun-Sang
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
著作論文
- Plasma-Assisted Dry Etching of Ferroelectric Capacitor Modules and Application to a 32M Ferroelectric Random Access Memory Devices with Submicron Feature Sizes
- Integration of Ferroelectric Random Access Memory Devices with Ir/IrO_2/Pb(Zr_xTi_)O^^_3/Ir Capacitors Formed by Metalorganic Chemical Vapor Deposition-Grown Pb(Zr_xTi_)O_3