Liquid Delivery Metal-Organic Chemical Vapor Deposition of Pb(Zr_xTi_<1-x>)O_3 Thin Films for High-Density Ferroelectric Random Access Memory Application
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Lee J
Samsung Advanced Inst. Technol. Suwon Kor
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Lee June
Materials & Devices Laboratory Samsung Advanced Institute Of Technology
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LEE Moon-Sook
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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Lee Moon-sook
Process Development Team Samsung Electronics
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HONG Sungho
Department of Chemistry, Inha University
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LEE Wanin
Department of Chemistry, Inha University
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LEE Yong
Materials & Devices Laboratory, Samsung Advanced Institute of Technology
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SHIN Sangmin
Materials & Devices Laboratory, Samsung Advanced Institute of Technology
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PARK Youngsoo
Materials & Devices Laboratory, Samsung Advanced Institute of Technology
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Lee J
Department Of Electronic And Electrical Engineering Pohang University Of Science And Technology (pos
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Park Youngsoo
Process Engineering Lab Samsung Advanced Institute Of Technology
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Lee W
Department Of Chemistry Inha University
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Hong Sungho
Department Of Chemistry Inha University
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Shin Sangmin
Process Engineering Lab Samsung Advanced Institute Of Technology
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Lee Wanin
Department Of Chemistry Inha University
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Park Youngsoo
Materials & Devices Laboratory Samsung Advanced Institute Of Technology
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Shin Sangmin
Materials & Devices Laboratory Samsung Advanced Institute Of Technology
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