Two-Dimensional Fluid Simulation of Capacitively Coupled RF Electronegative Plasmas

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-05-15

著者

• YOON Hyun

  Department of Internal Medicine, Chonnam National University Hospital

• Chung Tae

  Department of Applied Life Science, The Graduate School, Yonsei University

• LEE Jae

  Department of Metallurgy, The University of Tokyo

• Lee J

  Korea Inst. Sci. And Technol. Seoul Kor

• Lee June

  Materials & Devices Laboratory Samsung Advanced Institute Of Technology

• Yoon H

  Dong‐a Univ. Busan

• Chung T

  Dong‐a Univ. Pusan Kor

• Lee Jung

  Integrated Optoelectronics Devices Section Electronics And Telecommunication Research Institute

• Lee Jung

  Compound Semicnductor Research Department Electronics And Telecommunications Research Instiute

• MENG Lin

  Department of Physics, Dong-A University

• Meng Lin

  Department Of Physics Dong-a University:(permanent Address)high Energy Electronics Institute Univers

• Lee J

  Department Of Electronic And Electrical Engineering Pohang University Of Science And Technology (pos

• Lee Jae

  Department Of Acupuncture & Moxibustion College Of Oriental Medicine

• Yoon Hyun

  Department Of Biotechnology Ajou University

• YOON Hyun

  Department of Biological Sciences, Korea Advanced Institute of Science and Technology

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