Two-Dimensional Fluid Simulation and Langmuir Probe Measurement of a Planar Inductively Coupled Oxygen Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-15
著者
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YOON Hyun
Department of Internal Medicine, Chonnam National University Hospital
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Chung Tae
Department of Applied Life Science, The Graduate School, Yonsei University
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Seo Dong
Department Of Applied Chemistry Konkuk University
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Seo Dong
Department Of Physics Dong-a University
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Yoon Hyun
Department Of Physics Dong-a University
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Yoon Hyun
Department Of Biotechnology Ajou University
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