Analysis of Electron Temperature in DC Ar/SF

概要

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Electronegative plasmas are generated by adding SF<inf>6</inf>gas to a background argon (Ar) DC plasma with parameters of n_{0} = 1\times 10^{10} cm<sup>3</sup>and T_{\text{e}} = 2 eV. The heating current of the thoriated filament was in the range of 20.5--21.5 A and the plasmas were generated under a discharge condition of 100 V/0.4 A. The amount of negative ions was controlled by adjusting the ratio of flow rate of SF<inf>6</inf>= 0--10% to that of Ar. Plasma parameters were measured using cylindrical and planar electric probes. The behavior of electrons, which means the change in a parameter due to negative ion production, is characterized by measuring the floating and plasma potentials, and electron temperature. Electron temperature seems to increase and the potentials decrease with SF<inf>6</inf>flow rate.
2013-11-25