Hydrogen-Induced Degradation of Oxygen Plasma Treated Ferroelectric Pb (Zr,Ti)O_3 Capacitor
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概要
- 論文の詳細を見る
Electron cyclotron resonance (ECR) oxygen plasma treatment of the Pt/Pb (Zr_xTi_<1-x>)O_3/Pt capacitor was attempted to reduce the property degradation due to hydrogen. It was found that oxygen plasma treatment using ECR modifies the surface of Pt electrodes. Surface modification deteriorates catalytic activity of Pt electrodes, thereby significantly improving ferroelectric properties such as remnant polarization and leakage current. It seems that highly reactive oxygen radicals in ECR plasma play an important role in deteriorating the catalytic activity of Pt electrodes.
- 社団法人電子情報通信学会の論文
- 1999-07-23
著者
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Lee J
Samsung Advanced Inst. Technol. Suwon Kor
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Lee June
Microelectronics Laboratory Materials And Device Sector Samsung Advanced Institute Of Technology
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CHUNG Ilsub
Microelectronics Laboratory, Materials and Device Sector, Samsung Advanced Institute of Technology
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Par Youngsoo
Microelectronics Laboratory, Samsung Advanced Institute of Technology
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Park Youngsoo
Process Engineering Lab Samsung Advanced Institute Of Technology
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Chung I
Microelectronics Laboratory Samsung Advanced Institute Of Technology
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Chung Ilsub
Material & Device Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Materials And Devices Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Microelectronics And Device Laboratory Samsung Advanced Institute Of Technology
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Park Youngsoo
Microelectronics Laboratory Materials And Device Sector Samsung Advanced Institute Of Technology
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