FERROELECTRIC PROPERTIES OF SOL-GEL DERIVED Pb(Zr, Ti)O_3 CAPACITORS GROWN ON IrO_2 ELECTRODE
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概要
- 論文の詳細を見る
Improvement of reliability, specially high endurance and retention characteristics, of PZT capacitors has been a main question for high density FeRAM development. Pt/IrO_2 hybrid electrode has been suffered from the hydrogen degradation due to the strong catalytic function of Pt. Thus, IrO_2 electrode can be a good candidate for the minimizing hydrogen related degradation. We have investigated the variation in ferroelectric properties such as fatigue, retention and hydrogen effect of PZT capacitors grown on the IrO_2 electrodes in comparison with those grown on the Pt/IrO_2 hybrid electrode
- 社団法人電子情報通信学会の論文
- 2001-06-29
著者
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CHUNG Ilsub
Microelectronics Laboratory, Materials and Device Sector, Samsung Advanced Institute of Technology
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Yi Insook
Osaka Uoiversity
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Yi Insook
Microelectronics And Device Laboratory Samsung Advanced Institute Of Technology
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Roh Yonghan
School Of Electrical And Computer Engineering Sungkyunkwan University
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Chung I
Microelectronics Laboratory Samsung Advanced Institute Of Technology
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Chung Ilsub
Material & Device Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Materials And Devices Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Microelectronics And Device Laboratory Samsung Advanced Institute Of Technology
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KIM DAEIK
School of Electrical and Computer Engineering, Sungkyunkwan University
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ROH YOUGHAN
School of Electrical and Computer Engineering, Sungkyunkwan University
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Kim Daeik
School Of Electrical And Computer Engineering Sungkyunkwan University
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Roh Yonghan
Microelectronics and Device Laboratory, Samsung Advanced Institute of Technology
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- FERROELECTRIC PROPERTIES OF SOL-GEL DERIVED Pb(Zr, Ti)O_3 CAPACITORS GROWN ON IrO_2 ELECTRODE
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