Application of Scanning Probe Microscope(SPM)for Novel Characterization of Ferrolectric Capacitor
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概要
- 論文の詳細を見る
Novel attempts have been made to analyze the electrical properties of the nanometer scaled devices in ULSI integrated circuits by utilizing SPM. Similar efforts have also been given in various ferroelectic application fields. This study tried to measure hysteresis loop of submicron size ferroleectric capacitors using SPM as a probe tip. In addition, some useful results such as the conductivity mapping of the crosss-sectional sample obtained 4M FRAM and direct polarization monitoring using KFM mode will be discussed thereby prospecting some possible future applications of SPM technology
- 社団法人電子情報通信学会の論文
- 2001-06-29
著者
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Yi Insook
Material & Device Lab Samsung Advanced Institute Of Technology
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Chung I
Microelectronics Laboratory Samsung Advanced Institute Of Technology
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Chung Ilsub
Material & Device Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Materials And Devices Lab Samsung Advanced Institute Of Technology
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Chung Ilsub
Microelectronics And Device Laboratory Samsung Advanced Institute Of Technology
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Yasutake Masatoshi
Material & Device Lab, Samsung Advanced Institute of Technology
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Yasutake Masatoshi
Seiko Instruments Inc.
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Yasutake M
Seiko Instruments Inc. Shizuoka Jpn
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Yasutake Masatoshi
Seiko Instruments & Electronics Scientific Instruments Department
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Chung Ilsub
Seiko Instruments Inc.
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