Improvement of Kelvin Probe Force Microscope (KFM) System

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概要

• 論文の詳細を見る

• The Kelvin probe force microscope (KFM) is a useful tool that measures the surface potentials of both conducting and nonconducting materials. Recently, we have succeeded in improving the accuracy of potential measurements and increased the lateral resolution of the topographic image. Furthermore, Z axis servo control was improved to prevent the tip from coming into contact with the sample surface during scanning. Finally, the force gradient between the tip and the sample became steeper during the acquisition of the topographic image due to the inactivation of the modulation AC voltage. As a result, the potential resolution was less than 1 mV and the lateral resolution of the topographic image was improved to as high as 10 nm.

• 社団法人応用物理学会の論文
• 1995-06-30

著者

• Yasutake Masatoshi

  Seiko Instruments & Electronics Scientific Instruments Department

関連論文

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• Instrumentation of the High-Vacuum Atomic Force Microscope
• Quantitative Analysis of the Magnetic Properties of Metal-Capped Carbon Nanotube Probe
• Improvement of Kelvin Probe Force Microscope (KFM) System
• Scanning Surface Potential Microscopy for Local Surface Analysis

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