Improvement of Contact Resistance of Ru electrode/TiN barrier at Ru/Crystalline-Ta_2O_5/Ru Capacitor for 50nm DRAM device
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Lim Han-jin
Semiconductor R&d Center Samsung Electronics Co.
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Lim Han-jin
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Moon Joo-tae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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LIM HanJin
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co. Ltd.
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CHUNG Suk-Jin
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co. Ltd.
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LEE Jinil
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co. Ltd.
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KIM Jin
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co. Ltd.
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CHUNG SukJin
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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LEE Kwanghee
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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YOO ChaYoung
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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KIM SungTae
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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CHUNG Uin
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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MOON JooTae
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Chung Suk-jin
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Kim Sung-tae
Advanced Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Jinil
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Lee Kwanghee
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Yoo Cha-young
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Chung U-in
Semiconductor R & D Center Samsung Electronics Co.ltd.
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Lee Kwanghee
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Yoo Chayoung
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Kim Jin
Advanced Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Kim Jin
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Lim Hanjin
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Moon Jootae
Process Development 1, Semiconductor R&D, Samsung Electronics Co. Ltd.
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MOON Joo-Tae
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co. Ltd.
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