Simulated Performance of ArF Excimer Laser Lithography Optics
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概要
- 論文の詳細を見る
In ArF excimer laser lithography, catadioptric systems are widely used as projection optics. We have designed and analyzed two systems consisting of a mirror, a polarizing beam splitter, quarter wave plates and corrector lenses. Combination of a polarizing beam splitter and a quarter wave plate is used to separate the forward and backward beam and to remove the central obscuration. The life time of optical systems are analyzed by using the energy density conversion factor.
- 社団法人電子情報通信学会の論文
- 1997-07-24
著者
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Lee K
Etri Taejon Kor
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Lee Ki
Samsung Electronics Co. Semiconductor R & D Center Memory Process Development Team
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Kim Jae
Yonsei University
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Kim J
Electronics And Telecommunications Res. Inst. Taejon Kor
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Kim J.s.
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Yoo H
Electronics And Telecommunications Res. Inst. Taejon Kor
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Chung Hai
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Lee Kag
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Kim Doh
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Choi Sang-Soo
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Kim Jong
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Yoo Hyung
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Lee K
Semiconductor R&d Center Samsung Electronics Co. Ltd
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Yoo Hyung
Semiconductor Tehnology Division Electronics And Telecommunications Research Institute
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Yoo Hyung
Semiconductor Division Etri
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Kim Doh
Semiconductor Tehnology Division Electronics And Telecommunications Research Institute
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Choi S‐s
Electronics And Telecommunications Res. Inst. Taejon Kor
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Chung H
Electronics And Telecommunications Res. Inst. Taejon Kor
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Chung Hai
Semiconductor Technology Division Electronics And Telecommunications Research Institute
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Choi Sang-soo
Semiconductor Technology Division Electronics And Telecommunications Research Institute
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