APPLICATIONS OF CHEMICAL-MECHANICAL-POLISHING PROCESS TO SILICON FIELD EMITTER ARRAY
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概要
- 論文の詳細を見る
We have fabricated and characterized silicon field emitter arrays by Chemical-Mechanicai-Polishil1g (CMP) process for a clearly cutted gate electrode that was exactly aligned to the emitter. A very high etching selectivity (> 200:1) between the gate electrode and the dielectric was used for preventing the tip from etching off during the CMP. Furthermore, focusing electrodes were also fabricated by the CMP process.
- 社団法人電子情報通信学会の論文
- 1997-02-14
著者
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LEE Sang
Department of Pulmonary and Critical Care Medicine, Gachon University, Gil Medical Center
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Yu Byoung-gon
Semiconductor Division Electronics And Telecommunications Research Institute
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Lee S
Department Of Physics Kyungpook National University
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Lee J
Micro-electronics Tech. Lab. Electronics And Telecommunications Research Institute
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Kang S
Electronics And Telecommunications Res. Inst. (etri) Daejeon Kor
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Kang Sung
Semiconductor Division Electronics And Telecommunications Research Institute
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Yoo H
Electronics And Telecommunications Res. Inst. Taejon Kor
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Yoo Hyung
Semiconductor Tehnology Division, Electronics and Telecommunications Research Institute
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Lee Sang
Department Of Advanced Materials Science And Engineering Mokpo National University
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Yoo Hyung
Semiconductor Tehnology Division Electronics And Telecommunications Research Institute
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Yoo Hyung
Semiconductor Division Etri
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Song Yoon-Ho
Semiconductor Division, Electronics and Telecommunications Research Institute
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Lee Jin
Semiconductor Division, Electronics and Telecommunications Research Institute
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Cho Kyoung
Semiconductor Division, Electronics and Telecommunications Research Institute
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Yu Byoung
Semiconductor Technology Div., Electronics and Telecommunications Research Institute
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Song Y‐h
Micro-electronics Tech. Lab. Electronics And Telecommunications Research Institute
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Cho Kyoung
Micro-electronics Tech. Lab. Electronics And Telecommunications Research Institute
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LEE Sang
Department of Acupuncture & Moxibustion, College of Oriental Medicine, Kyung Hee University
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