Composition Control of Lead Zirconate Titanate Thin Films in Electron Cyclotron Resonance Plasma Enhanced Chemtical Vapor Deposition System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-05-15
著者
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NO Kwangsoo
Department of Materials Science and Engineeing, KAIST
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Lee W‐j
Sejong Univ. Seoul Kor
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Kim J‐w
Hoseo Univ. Chungnam Kor
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No Kwangsoo
Department Of Material Science And Engineering Korea Advanced Institute Of Science And Technology
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No Kwangsoo
Department Of Materials Science And Engineering
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LEE Won-Jong
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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Shin J‐s
Kaist Taejon Kor
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KIM Jae-Whan
Department of Materials Science and Engineering
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SHIN Joong-Shik
Department of Materials Science and Engineering
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WEE Dang-Moon
Department of Materials Science and Engineering
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Lee W‐j
Department Of Advanced Materials Engineering Sejong University
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Wee Dang-moon
Department Of Materials Science And Engineering Kaist
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Kim Jin-won
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim Jin-won
Department Of Metallurgical Engineering Seoul National University
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Lee Won-jong
Department Of Computer Science Yonsei University
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