Effects of Sr/Ti Ratio on the Step Coverage of SrTiO_3 Thin Films Fabricated Using Electron Cyclotron Resonance Plasma Enhanced Metal Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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No Kwangsoo
Department Of Material Science And Engineering Korea Advanced Institute Of Science And Technology
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Park Soon
Department Of Inorganic Materials Engineering College Of Engineering Seoul National University
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Choi J
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Choi J
Department Of Material Science And Engineering Korea Advanced Institute Of Science And Technology
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Choi Jongwan
Department Of Material Science And Engineering Korea Advanced Institute Of Science And Technology
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Park Soon
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Park Soon
Department Of Agronomy College Of Agriculture Kyungpook National University:(present)csiro Division
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