Composition Control of Lead Zirconate Titanate Thin Films in Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition System
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概要
- 論文の詳細を見る
Lead zirconate titanate (PZT) thin films were fabricated on Pt/Ti/SiO2/Si substrates by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR-PECVD). Lead β-diketonate ( Pb(DPM)2, zirconium t-butoxide ( Zr(OC4H9)4) and titanium i-propoxide ( Ti(OC3H7)4) were used as metalorganic (MO) precursors. Perovskite single-phase PZT films were obtained at temperatures below 500° C when the Pb/(Zr+Ti) concentration ratio was close to 1. The cation concentrations in the PZT films were successfully controlled by adjusting the flow rate of each MO source. The variation in composition and structure with the process temperature and the MO source flow rates was discussed.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1996-05-15
著者
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No Kwangsoo
Department Of Material Science And Engineering Korea Advanced Institute Of Science And Technology
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KIM Jae-Whan
Department of Materials Science and Engineering
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SHIN Joong-Shik
Department of Materials Science and Engineering
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WEE Dang-Moon
Department of Materials Science and Engineering
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Lee Won-jong
Department Of Computer Science Yonsei University
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Lee Won-Jong
Department of Materials Science and Engineering, KAIST, Taejon, 305-701, Korea
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No Kwangsoo
Department of Materials Science and Engineering, KAIST, Taejon, 305-701, Korea
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Shin Joong-Shik
Department of Materials Science and Engineering, KAIST, Taejon, 305-701, Korea
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Wee Dang-Moon
Department of Materials Science and Engineering, KAIST, Taejon, 305-701, Korea
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Kim Jae-Whan
Department of Materials Science and Engineering, KAIST, Taejon, 305-701, Korea
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