Effects of Sol-Gel Processing Variables on the Texture Growth of LiNbO_3 Thin Film

概要

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Highly oriented lithium niobate (LiNbO_3) thin films were fabricated using the sol gel spin coating method. The effects of the sol-gel processing variables, such as reflux time, crystallization temperature and substrate, on the development of texture on the thin film were investigated. The film made from the solution refluxed for 5 h and deposited on a sapphire (012) substrate showed highly oriented growth at the crystallization temperature of 500℃. The film had homogeneous and pore-free microstructure. The film made from the solution refluxed for 1 h showed only preferred orientation and porous microstructure under the same processing conditions. The. thin films deposited on MgO(100) substrates were polycrystalline. The crystallization temperature and the film thickness significantly affected the crystallinity and the orientation of the films.
社団法人応用物理学会の論文
1996-01-15