Effects of Electrodes on the Electric Properties of Pb(Zr, Ti)O_3 Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-03-15

著者

• Lee Hee-chul

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• LEE Won-Jong

  Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology

• Lee H‐c

  Korea Advanced Inst. Sci. And Technol. Taejeon Kor

• Chung S‐o

  Department Of Materials Science And Engineering Kaist

• Chung Su-ock

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Lee Won-jong

  Department Of Computer Science Yonsei University

• Lee Won-jong

  Department Of Materials Science And Engineering Kaist

• Lee Hee-chul

  Department Of Materials Science And Engineering Kaist

• Lee Hee-chul

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology

• Lee Hee-Chul

  Department of Advanced Materials Engineering, Korea Polytechnic University, Siheung 429-793, Korea

関連論文

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• The Effects of the Preparation Conditions and Heat-Treatment Conditions of Pt/Ti/SiO_2/Si Substrates on the Nucleation and Growth of Pb(Zr, Ti)O_3 Films
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