ED2000-68 / SDM2000-68 Calculation of polarization and mobile charge density in ferroelectric films on Si using TVS (Triangular Voltage Sweep) method

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概要

• 論文の詳細を見る

• The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This TVS method yield a polarizable and an ionic displacement current peaks whose areas are proportional to the total polarization reversal charge and the total mobile ionic space charge, respectively. The calculated polarization and the mobile charge density TVS measured at 250°C were 0.42 μC/cm^2 and 5.5 × 10^<11> mobile ions/cm^2 in the SBT film of MFIS structure, and 1.4 μC/cm^2 in the LiNbO_3 film of MFS structure, respectively.

• 社団法人電子情報通信学会の論文
• 2000-06-22

著者

• Lee Won-jae

  Electronics And Telecommunications Research Institute

• Lee Won-jae

  Research Center For Electronic Ceramics (rcec) Department Of Advanced Materials Engineering Dong-eui

• Kim Kwang-ho

  Department Of Semiconductor Engineering Cheongju University

• JEONG Sang

  Department of Physiology, College of Veterinary Medicine, Konkuk University

• Yu B‐g

  It Convergence And Component Laboratory Electronics And Telecommunications Research Institute

• Yu Byoung-gon

  Electronics And Telecommunications Research Institute

• Yu Byoung-gon

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

• Lee Nam-yeal

  Department Of Semiconductor Engineering Cheongju University

• Jeong Sang-hyun

  Department Of Semiconductor Engineering Cheongju University

• You In

  Electronics And Telecommunications Research Institute

• Lee Won-jae

  Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology

• Lee Won-jae

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

• Kim Jin-kyu

  Department Of Semiconductor Engineering Cheongju University

• Kim Y‐s

  Department Of Semiconductor Engineering Cheongju University

• Kim Yong-Seong

  Department of Semiconductor Engineering, Cheongju University

• Jung Soon-Won

  Department of Semiconductor Engineering, Cheongju University

• Yu Byung-Gon

  Electronics and Telecommunications Research Institute

• Yang Yil-Suk

  Electronics and Telecommunications Research Institute

• Kim Yong-seong

  Department Of Semiconductor Engineering Cheongju University

• Kim Kwang-ho

  Department Of Architecture Inha University

• Jung Soon-won

  It Convergence & Components Laboratory Electronics And Telecommunications Research Institute

• Jung Soon-won

  Department Of Semiconductor Engineering Cheongju University

• Jeong Sang

  Department Of Dermatology And Division Of Brain Korea 21 Project For Biomedical Science Korea Univer

• Kim Yong-seong

  Department Of Physical Therapy Nambu University

• Kim Kwng-Ho

  Department of Semiconductor Engineering, Cheongju University

• Jeong Sang

  Department of Chemical Engineering, Chungbuk National University

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