Fluoridation of GaAs Surface in a Remote SF_6 Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-08-01

著者

• Kim Kwang-ho

  Department Of Semiconductor Engineering Cheongju University

• Suh Kyung-soo

  Semiconductor Technology Division Electronics And Telecommunications Research Institute

• Kim Kwang-ho

  Department Of Semiconductor Engineering Cheong-ju University

• Kim Kwang-ho

  Department Of Architecture Inha University

• SUH Kyung-Soo

  Semiconductor Division, Electronics and Telecommunications Research Institute

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