A Low Operating Voltage(3V)Metal-Ferroelectric-Semiconductor(MFS)FET's Using LiNbO_3/Si(100)Structures For Nonvolatile Memory Application
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概要
- 論文の詳細を見る
N-channel metal-ferroelectric-semiconductor field-effect-transistors(MFSFET's)by using rapid thermal annealed LiNbO_3/Si(100)structures were fabricated and demonstrated nonvolatile memory operations of the MFSFET's. The estimated field-effect electron mobility and transconductance on a linear region of the fabricated FET were 600 cm^2/V・s and 0.16 mS/mm, respectively.The drain current of the "on"state was more than 4 orders of magnitude larger than the "off"state current at the same "read"gate voltage of 0.5V, which means the memory operation of the MFSFET. A write voltage as low as ±3V, which is applicable to low power integrated circuits, was used for polarization reversal.
- 社団法人電子情報通信学会の論文
- 1998-07-24
著者
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Lee Won-jae
Electronics And Telecommunications Research Institute
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Lee Won-jae
Research Center For Electronic Ceramics (rcec) Department Of Advanced Materials Engineering Dong-eui
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheongju University
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Yu B‐g
It Convergence And Component Laboratory Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Lyu J‐s
Electronics And Telecommunications Res. Inst. Daejon Kor
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Lyu Jong-son
Electronics And Telecommunications Research Institute
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Lee Won-jae
Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology
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Lee Won-jae
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Lee Sang-woo
Department Of Nuclear Medicine School Of Medicine Kyungpook National University
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Lee Sang-woo
Department Of Semiconductor Engineering Cheongju University
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Lee Sang-woo
Department Of Biomedical Engineering Yonsei University
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Jung Soon-Won
Department of Semiconductor Engineering, Cheongju University
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Kim Chae-Gyu
Department of Semiconductor Engineering, Cheongju University,
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Kim Chae-gyu
Department Of Semiconductor Engineering Cheongju University
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Kim Kwang-ho
Department Of Semiconductor Engineering Chong-ju University
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Kim Kwang-ho
Department Of Architecture Inha University
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Jung Soon-won
It Convergence & Components Laboratory Electronics And Telecommunications Research Institute
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Jung Soon-won
Department Of Semiconductor Engineering Cheongju University
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