FABRICATION OF POLY-SI TFT ON THE GLASS SUBSTRATE BY METAL-INDUCED LATERAL CRYSTALLIZATION

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概要

• 論文の詳細を見る

• Metal contamination free Poly-Si TFT's could be fabricated on the glass substrate at 450℃ by Metal Induced Lateral Crystallization (MILC) method. The channel area was laterally crystallized from the source and drain areas, where the thin film of nickel was deposited in a self aligned manner. Electrical activation of the source and drain could be achieved by annealing at 450℃ after the ion mass doping of phosphorus. The N-channel TFTs showed the mobility of 〜53cm^2/Vs, and the on/off current ratio was higher than 10^6

• 社団法人映像情報メディア学会の論文
• 1997-02-13

著者

• Kim K‐h

  Department Of Semiconductor Engineering Cheongju University

• Kim T

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Lee B‐i

  Seoul National Univ. Seoul Kor

• Lee Byung-il

  School Of Material Science And Engineering Seoul-national University

• Joo Seung-Ki

  Division of Materials Science and Engineering Seoul National University

• Joo S‐k

  Seoul National Univ. Seoul Kor

• Joo Seung-ki

  School Of Material Science And Engineering Seoul-national University

• Joo Seung-ki

  Division Of Materials Science And Engineering College Of Engineering Seoul National University

• Joo Seung-ki

  Division Of Materials Science And Engineering Seoul National Univ.

• Kim Kwang-ho

  Department Of Semiconductor Engineering Chong-ju University

• Kim Kwang-ho

  Division Of Materials Science And Engineering Seoul National Uriversity

• Jeong Won-cheol

  Division Of Materials Science And Engineering Seoul National University

• Kim T‐k

  School Of Material Science And Engineering Seoul-national University

• Ahn Pyung-soo

  Division Of Materials Science And Engineering Seoul National Uriversity

• Lee B‐i

  School Of Material Science And Engineering Seoul-national University

• Shin Jim-wook

  Division Of Materials Science And Engineering Seoul National Uriversity

• Joo Seung-ki

  Division Of Materials Science Ancl Engineering College Of Engineering Seoul National University

• Kim Tae-kyung

  Department Of Dyeing And Finishing College Of Engineering Kyungpook National University

• Kim Tae-kyung

  Division Of Materials Science Ancl Engineering College Of Engineering Seoul National University

• Lee Byung-IlLee

  Division of Materials Science and Engineering, Seoul National University

• Shin Jin-Wook

  Division of Materials Science and Engineering, Seoul National University

• 〓 〓〓

  Division of Materials Science and Engineering, Seoul National University

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