Effects of tilt-cut Si substrates on crystal structure and magnetic anisotropy of metallic ferromagnetic thin films

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Metallic ferromagnetic thin films such as a 500Å of Co, Fe and Ni films were prepared on Si (111) and 4° tilt-cut Si (111) substrates with a 50Å of Cu buffer layer and the effects of tilt-cut Si substrates on the crystallinity and magnetic anisotropy of the films were investigated. From the measurement of M-H curves and a revised X-ray diffraction (XRD) study, it was found that 4° tilt-cut Si (111) substrates are effective to obtain a film of uniaxial magnetic anisotropy with a preferred orientation. When the correlation of crystal structure and magnetic anisotropy was analyzed in each Co, Fe, Ni film on Si (111) and 4° tilt-cut Si (111) substrates, it was observed that a transition of crystallinity from close packed structure to less packed structure is accompanied by a transition of magnetic anisotropy according as the substrate is varied from Si (111) to 4° tilt-cut Si(111). It has been believed that the tilt-cut Si substrates are useful for many technological applications in viewpoint of easy development of various magnetic anisotropies by a control of film growth and structures.
社団法人映像情報メディア学会の論文
1997-11-20