SUH Kyung-Soo | Semiconductor Division, Electronics and Telecommunications Research Institute
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概要
関連著者
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheongju University
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Suh Kyung-soo
Semiconductor Technology Division Electronics And Telecommunications Research Institute
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Kim Kwang-ho
Department Of Architecture Inha University
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SUH Kyung-Soo
Semiconductor Division, Electronics and Telecommunications Research Institute
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Yu Byoung-Gon
Semiconductor Division, ETRI,
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Yu Byoung-gon
Semiconductor Division Electronics And Telecommunications Research Institute
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Baek Jong
Semiconductor Technology Division Electronics And Telecommunications Research Institute
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Baek Jong
Semiconductor Division Electronics And Telecommunications Research Institute
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheong-ju University
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Kim Kwang-Ho
Department of Semiconductor Engineering, Cheongju University
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Yu Byoung-Gon
Semiconductor Division, Electronics and Telecommunications Research Institute
著作論文
- Characteristics of SiOF Films Formed by Remote Plasma Enhanced Chemical Vapor Deposition with SF_6 Gas
- Fluoridation of GaAs Surface in a Remote SF_6 Plasma