A Novel Electron-Beam Exposure Epitaxy for Growing GaAs Films on Fluoride/Si Structures
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概要
- 論文の詳細を見る
A novel heteroepitaxy technique, which we call electron-beam exposure epitaxy (EBE-epitaxy), has been employed in growing GaAs films on CaF_2/Si(111) structures. In this method, prior to the growth of GaAs films, the surfaces of CaF_2are exposed to an electron-beam under impingement by arsenic fluxes. It has been found that thin GaAs films with excellent crystallinity and smooth surfaces can be obtained on the CaF_2/Si(111) structures. It has also been found that mixing of regular (type A) and rotationally twinned (type B) crystallites does not occur in the films, but that they show preferential and dominant type A orientation which is identical to that of the CaF_2.
- 社団法人応用物理学会の論文
- 1987-11-20
著者
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Lee Hee
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Lee Hee
Department Of Eecs Korea Advanced Institute Of Science And Technology
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Lee Hee
Department Of Electrical Engineering And Computer Science Kaist
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FURUKAWA Seijiro
Graduate School of Science and Engineering, Tokyo Institute of technology
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ISHIWARA Hiroshi
Graduate School of Science
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KANEMARU Seigo
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Kanemaru S
Aist Ibaraki Jpn
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Kanemaru Seigo
Nanoelectronics Research Institute Aist
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Kanemaru Seigo
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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Kanemaru Seigo
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Kanemaru Seigo
Tsukuba Laboratory Yaskawa Electric Co. Ltd.
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Ishiwara Hiroshi
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Ishiwara Hiroshi
Tokyo Institute Of Technology Interdisciplinary Graduate School Of Science And Engineering
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Ishiwara Hiroshi
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Ishiwara H
Tokyo Institute Of Technology Interdisciplinary Graduate School Of Science And Engineering
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FURUKAWA Seigo
Department of Electronics, Nippondenso Technical College
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Furukawa S
Kyushu Inst. Technology Fukuoka Jpn
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Furukawa Seijiro
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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