A Study on Lateral Surface Treatment of the CdTe X-ray image-sensor
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概要
- 論文の詳細を見る
A CdTe X-ray sensor for dental X-ray imaging is fabricated and the effect of a lateral surface treatment is investigated. Due to non-uniform edge pixels in the CdTe X-ray sensor, the number of effective pixels that can be used for the final image is reduced, and a line defect is introduced when several sensors are put together for the target resolution. To improve the roughness of the lateral surface, a lateral surface polishing process is introduced. The polishing process reduces dead pixels by 76%, from 304 to 76. By lateral surface polishing, most of the dead pixels near the device edge become normal pixels. The non-uniform edge pixels are improved by the lateral surface treatment without affecting the central pixels of the CdTe X-ray image sensor. The effective resolution is extended to the edges of device; therefore, the entire area of the CdTe X-ray sensor can be used for the final image.
- 社団法人電子情報通信学会の論文
- 2009-06-17
著者
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Lee Yong
Korea Advanced Inst. Sci. And Technol. Daejeon Kor
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Lee Hee
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Lee Hee
Dept. Of Eecs Korea Advanced Institute Of Science And Technology:national Nanofab Center
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Lee Hee
School Of Electrical Engineering And Computer Sciences Korea Advanced Institute Of Science And Techn
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Lee Hee
School Of Electrical Engineering And Computer Science Division Of Electrical Engineering Korea Advan
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Lee Hee
Dept Of Eecs Korea Advanced Institute Of Science And Technology
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Lee Yong
Dept. of Electrical Eng., Korea Advanced Institute of Science and Technology
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Kim Jin
Dept. Of Eecs Korea Advanced Institute Of Science And Technology
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Lee Yong
Dept. Of Eecs Korea Advanced Institute Of Science And Technology
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Lee Yong
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Lee Yong
Department Of Electrical Engineering And Computer Science Kaist
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Lee Yong
Dept Of Eecs Korea Advanced Institute Of Science And Technology
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Lee Yong
Dept. Genet. Eng. Coll. Nat. Sci. Kyungpook Natl. Univ. Korea
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Yang Keedong
i3system Company
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Yang K
I3system Company
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Kim Jin
Dept. Of Computer Science Kaist
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Lee Hee
School Of Electrical Engineering And Computer Sciences Korea Advanced Institute Of Science And Techn
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Lee Yong
Dept. Chemical and Biomolecular Engineering, KAIST
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