Retention characteristics of nano scale ferroelectric VDF/TrFE copolymer film (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))

概要

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A Metal Insulator Metal (MIM) capacitor, which employs a spin-coated ferroelectric VDF/TrFE copolymer thin film, was fabricated and its ferroelectric characteristics were systematically analyzed. The remanent polarizations on each polymer thickness are investigated, where a constant electric field and varying pulse period are applied. It is found that the switching time applied from the Avrami equation is not sufficient to reverse a certain polarized phase of the VDF/TrFE copolymer. In this study, we attempt to explain these characteristics by the nucleation-growth theory. A thinner polymer under the same electric field and pulse duration time shows shorter retention time. Thus, it can be concluded that the uncompensated charge of the thinner film caused by the electrodes yields a stronger depolarization field effect. This is described by the calculation of the depolarization phenomenon. The importance of data writing time and polymer thickness with respect to retention time for ferroelectric nonvolatile memory devices is demonstrated.
社団法人電子情報通信学会の論文
2007-06-18