CHF_3 Plasma Treatment of Si Field Emitter Arrays For No Damage Vacuum Packaging
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-07-15
著者
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MATSUKAWA Takashi
National Institute of Advanced Industrial Science and Technology
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ITOH Junji
Electrotechnical Laboratory
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KANEMARU Seigo
Electrotechnical Laboratory
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MATSUKAWA Takashi
Electrotechnical Laboratory
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Kanemaru S
Aist Ibaraki Jpn
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Kanemaru Seigo
Nanoelectronics Research Institute Aist
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Kanemaru Seigo
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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Kanemaru Seigo
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Kanemaru Seigo
Tsukuba Laboratory Yaskawa Electric Co. Ltd.
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Itoh J
Aist Ibaraki Jpn
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Itoh J
Nanoelectronics Research Institute Aist
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Itoh Junji
Tsukuba Laboratory Yaskawa Electric Co. Ltd.
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Nagao M
Laboratory Of Biosignals And Response Department Of Applied Molecular Biology Kyoto University
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Nagao M
National Institute For Materials Science
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Matsukawa T
National Institute Of Advanced Industrial Science And Technology
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NAGAO Masayoshi
Electrotechnical Laboratory
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TANABE Hisao
Dai Nippon Printing Co., Ltd.
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Tanabe Hisao
Dai Nippon Printing Co. Ltd.
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Kanemaru Seigo
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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