Fabrication of a Three-Dimensional Vacuum Magnetic Sensor with a Si Tip
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概要
- 論文の詳細を見る
A new vacuum magnetic sensor (VMS) device suitable for three-dimensional detection of magnetic flux was fabricated. This device consists of a Si field emitter tip that generates a cross-shaped electron beam and an anode that is divided into eight symmetrically arranged sectors. The cross-shaped electron beam is rotated and displaced from an initial position by the magnetic flux in accordance with the Lorentz force interaction. The rotation angle and the translational displacement were measured from the beam current imbalance between two neighboring anode sectors. Detection sensitivities of 10^4%/T and 10^3%/T were obtained for magnetic flux applied parallel and perpendicular to the VMS device, respectively.
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Kanemaru S
Aist Ibaraki Jpn
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Kanemaru Seigo
Nanoelectronics Research Institute Aist
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Kanemaru Seigo
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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Kanemaru Seigo
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Kanemaru Seigo
Tsukuba Laboratory Yaskawa Electric Co. Ltd.
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Itoh J
Aist Ibaraki Jpn
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Itoh J
Nanoelectronics Research Institute Aist
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Itoh Junji
Tsukuba Laboratory Yaskawa Electric Co. Ltd.
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UEMURA Koji
Electrotechnical Laboratory
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Uemura Kamon
Sony Corporation
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Kanemaru Seigo
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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