Improvement of Ferroelectric Properties in Mo-Substituted Bi3.35La0.75Ti3O12 Films by Optimization of Heating Rate
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概要
- 論文の詳細を見る
Bi3.35La0.75(Ti1-XMoX)3O12 (BLTM) ($X=0.005$) films were formed on Pt/Ti bottom electrodes by using a sol–gel spin-coating method in which the crystallization temperature, time, and ambience were fixed at 700°C, 30 min, and O2, respectively, but the heating rate was varied in the range from 1°C/s to 300°C/s. It was found through X-ray diffraction and transmission electron microscopy analyses that the heating rate dependences of the orientations and surface morphologies in the BLTM films were completely different from those in Bi3.35La0.75Ti3O12 (BLT) films. Under the optimum heating rate of 10°C/s, the remanent polarization value ($2\mathit{Pr}$) of 36 μC/cm2 and the leakage current density of $1.2\times 10^{-7}$ A/cm2 at 150 kV/cm were obtained for the BLTM film.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-02-15
著者
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OHKI Hiroshi
R&D Association for Future Electron Devices
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Ishiwara Hiroshi
Frontier Collaborative Research Center Tokyo Insitute Of Technology
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Ishiwara Hiroshi
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
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Wang Xusheng
R&D Association for Future Electron Device, 2-9-14 Toranomon, Minato-ku, Tokyo 105-0001, Japan
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Wang Xusheng
R&D Association for Future Electron Device, 2-9-14 Toranomon, Minato-ku, Tokyo 105-0001, Japan
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