Significant Enhancement of Bi3.45La0.75Ti3O12 Ferroelectricity Derived by Sol-Gel Method
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概要
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The ferroelectricity of sol-gel derived 80-nm Bi3.45La0.75Ti3O12 (BLT) films was significantly enhanced by low-pressure baking during the sol-gel process. The ferroelectricity enhancement was caused by the low-pressure baking after the drying process in air and before the crystallization of the dried gel. The maximum remanent polarization ($P_{\text{r}}$) was 27.2 μC/cm2, which was achieved after baking at 1.3 kPa oxygen pressure. The coercive field of 54.3 kV/cm was also achieved at the same time. This $P_{\text{r}}$ value is 2.3 times larger than the value attainable with the usual 1-atm baking process. The saturation property of the same capacitor proved that $+/-2$ V operation is possible. It was also found that the enhanced polarization is fatigue-free up to $10^{10}$ switching cycles.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-03-15
著者
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Ishiwara Hiroshi
Frontier Collaborative Research Center Tokyo Insitute Of Technology
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FUJISAKI Yoshihisa
Research and Developmetn Association of Future Electron Devices
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Iseki Kunie
Frontier Collaborative Research Center Tokyo Institute Of Technology
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Iseki Kunie
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
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Ishiwara Hiroshi
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
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