Low-Temperature Preparation of (111)-oriented Pb(Zr,Ti)O3 Films Using Lattice-Matched (111)SrRuO3/Pt Bottom Electrode by Metal–Organic Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Pb(Zr0.35Ti0.65)O3 (PZT) films 170 nm thick were prepared at 415 °C by pulsed metal-organic chemical vapor deposition. The (111)-oriented PZT films with local epitaxial growth were obtained on (111)SrRuO3/(111)Pt/TiO2/SiO2/Si substrates and their ferroelectricities were ascertained. Ferroelectricity was improved by postannealing under O2 gas flow up to 550 °C. Larger remanent polarization and better fatigue endurance were obtained using a SrRuO3 top electrode compared to a Pt top electrode for PZT films after annealing at 500 °C.
- 2009-04-25
著者
-
Cross Jeffrey
Fujitsu Laboratories Ltd.
-
Funakubo Hiroshi
Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology
-
Kuwabara Hiroki
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
-
Cross Jeffrey
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
-
Sumi Akihiro
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
-
Okamoto Shoji
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
-
Hoko Hiromasa
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan
-
Funakubo Hiroshi
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama 226-8503, Japan
関連論文
- Simultaneous Observation of Ferroelectric Domain Patterns by Scanning Nonlinear Dielectric Microscope and Surface Morphology by Atomic Force Microscope
- Preparation of SrBi_2Ta_2O_9 Thin Films by Liquid-Delivery Metalorganic Chemical Vapor Deposition using a Double Alcoholate Source
- Comparison of ferroelectric and insulating properties of Mn-doped BiFeO3 films formed on Pt, SrRuO3/Pt, and LaNiO3/Pt bottom electrodes by radio-frequency sputtering
- IrO_2/Pb(Zr,Ti)O_3/Pt Capacitor Degradation with D_2 Gas at Elevated Temperature
- Characteristics of Metal/Ferroelectric/Insulator/Semiconductor Using La_2O_3 Thin Film as an Insulator : Electrical Properties of Condensed Matter
- Evaluation of (Pb, La)(Zr, Ti)O_3 (PLZT) Capacitors of Different Film Thicknesses with Pt/SrRuO_3 Top Electrodes
- High Fatigue Endurance and Large Remanent Polarization in Pt/SrRuO3/BiFe0.95Mn0.05O3/SrRuO3/Pt Ferroelectric Capacitors Formed on SiO2-Coated Si Substrates
- High fatigue endurance and large remanent polarization in Pt/SrRuO3/BiFe0.95Mn0.05O3/SrRuO3/Pt ferroelectric capacitors formed on SiO2-coated Si substrates
- Characterization of D_2 Gas Interaction with (Pb, La)(Zr, Ti)O_3 Film on Pt and Ti at Elevated Temperature
- Fatigue Properties of (100)/(001) and (111) Oriented Pb(Zr, Ti)O_3 Thin Film Capacitors : Electrical Properties of Condensed Matter
- (Pb, La)(Zr, Ti)O_3 Film Grain-Boundary Conduction with SrRuO_3 Top Electrodes : Electrical Properties of Condensed Matter
- Effect of Deposition Time on Film Thickness and Their Properties for Hydrothermally-Grown Epitaxial KNbO3 Thick Films
- High Fatigue Endurance and Large Remanent Polarization in Pt/SrRuO_3/BiFe_Mn_O_3/SrRuO_3/Pt Ferroelectric Capacitors Formed on SiO_2-Coated Si Substrates
- Low-Temperature Preparation of (111)-oriented Pb(Zr,Ti)O3 Films Using Lattice-Matched (111)SrRuO3/Pt Bottom Electrode by Metal–Organic Chemical Vapor Deposition
- Effect of Oxygen Annealing on Ferroelectricity of BiFeO3 Thin Films Formed by Pulsed Laser Deposition
- Room-Temperature Electrical-Field Induced Oxygen Diffusion of Aluminum/Yttria-Stabilized Zirconia Thin Film Grown on Si Substrate
- Dependence of Ferroelectric Properties on Thickness of BiFeO3 Thin Films Fabricated by Chemical Solution Deposition
- Characteristics of Undoped and Mn-Doped BiFeO3 Films Formed on Pt and SrRuO3/Pt Electrodes by Radio-Frequency Sputtering
- Simultaneous Observation of Ferroelectric Domain Patterns by Scanning Nonlinear Dielectric Microscope and Surface Morphology by Atomic Force Microscope
- Comparison of Ferroelectric and Insulating Properties of Mn-Doped BiFeO3 Films Formed on Pt, SrRuO3/Pt, and LaNiO3/Pt Bottom Electrodes by Radio-Frequency Sputtering