Fatigue Properties of (100)/(001) and (111) Oriented Pb(Zr, Ti)O_3 Thin Film Capacitors : Electrical Properties of Condensed Matter

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The (111) and (100)/(001) oriented Pb(Zr, Ti)O_3 (PZT) thin film capacitors were prepared by chemical solution deposition (CSD) method. The (100)/(001) oriented PZT was deposited with thin PbTiO_3 (PT) buffer layer on Pt and Ir bottom electrodes. The initial switchable polarization (Q_<sw>) of (100)/(001) oriented PZT capacitors were lower than that of (111) oriented PZT capacitors. In the case of IrO_2/PZT[(100)/(001)]/Ir capacitors, the Q_<sw> after 5.8×10^9 fatigue cycles was 1.6 times higher than the initial value. However the hysteresis loops of the initial and after 5.8×10^9 cycles of (100)/(001) oriented PZT capacitors were almost same. An increased Qsw observed during fatigue test gradually decreased after the fatigue test. It appeared that the (100)/(001) oriented PZT capacitors were pulse poled by fatigue pulse trains. As a result, Q_<sw> increased during the measurements, however, it decreased with the lapse of time after fatigue test was completed. Such phenomenon was transitional and metastable.
社団法人応用物理学会の論文
2002-11-15