Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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斧 高一
京都大学大学院工学研究科
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斧 高一
京大 大学院工学研究科
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ONO Katsuji
Fujitsu Laboratories Ltd.
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Ono K
Department Of Applied Chemistry The University Of Tokyo
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Ono K
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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Ono K
Univ. California Ca Usa
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KAWAHARA Toshio
Department of Materials Science and Engineering, National Defense Academy
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YAMAMUKA Mikio
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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Ono K
The Faculty Of Engineering Ehime University
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Sato T
Research Center For Integrated Quantum Electronics (rciqe) And Graduate School Of Information Scienc
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Yamamuka M
Mitsubishi Electric Corp. Hyogo Jpn
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Yamamuka Mikio
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawahara T
Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn
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KAWAHARA Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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TARUTANI Masayoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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HORIKAWA Tsuyoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MATSUNO Shigeru
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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SATO Takehiko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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UCHIKAWA Fusaoki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Matsuno Shigeru
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Horikawa Tsuyoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Tarutani Masayoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawahara T
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Uchikawa F
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Uchikawa Fusaoki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sato Takehiko
Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan
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Kawahara Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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