Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-04-30

著者

• 斧 高一

  京都大学大学院工学研究科

• 斧 高一

  京大 大学院工学研究科

• ONO Katsuji

  Fujitsu Laboratories Ltd.

• Ono K

  Department Of Applied Chemistry The University Of Tokyo

• Ono K

  Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae

• Ono K

  Univ. California Ca Usa

• KAWAHARA Toshio

  Department of Materials Science and Engineering, National Defense Academy

• YAMAMUKA Mikio

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Ono Kouichi

  Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae

• Ono K

  The Faculty Of Engineering Ehime University

• Sato T

  Research Center For Integrated Quantum Electronics (rciqe) And Graduate School Of Information Scienc

• Yamamuka M

  Mitsubishi Electric Corp. Hyogo Jpn

• Yamamuka Mikio

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kawahara T

  Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn

• KAWAHARA Takaaki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• TARUTANI Masayoshi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• HORIKAWA Tsuyoshi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• MATSUNO Shigeru

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• SATO Takehiko

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• UCHIKAWA Fusaoki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Matsuno Shigeru

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Horikawa Tsuyoshi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Tarutani Masayoshi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kawahara T

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Uchikawa F

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Uchikawa Fusaoki

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Ono Kouichi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Sato Takehiko

  Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

• Kawahara Takaaki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

関連論文

• 2.ドライエッチングのモデルとその実験検証(ドライエッチングの科学と技術の新局面)
• 4.高誘電率(High-k)材料のドライエッチング(ドライエッチングの科学と技術の新局面)
• Highly Uniform Si-Doped GaAs Epitaxial Layers Grown by MBE Using a TEG, Arsenic, and Silicon System
• Substrate Temperature Dependence of Carbon Incorporation into GaAs Grown by MBE Using Triethylgallium and As_4
• Highly Uniform, High-Purity GaAs Epitaxial Layer Grown by MBE Using Triethylgallium and Arsenic : Semiconductors and Semiconductor Devices
• 1.はじめに(ドライエッチングの科学と技術の新局面)
• 8.おわりに(ドライエッチングの科学と技術の新局面)
• 最近の展望 マイクロプラズマスラスター
• 第58回気体エレクトロニクス会議(58th Gaseous Electronics Conference)
• An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching
• マイクロプラズマスラスターの研究開発 (特集 宇宙高温工学)
• 誘導結合型フルオロカｰボンプラズマを用いた高誘電率HfO_2薄膜のエッチング
• 半導体プラズマプロセスシミュレーションとTCAD
• プラズマCVDと溶媒処理を用いたフルオロカーボン系多孔質構造Low-K薄膜の作成
• Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
• Si ドライエッチング技術
• 3.1 プラズマエッチング : 3. プラズマプロセス装置におけるプラズマ・表面相互作用(プラズマ・表面相互作用) : 多様なPSI現象
• Photoacoustic Spectra of Heavily Co-Doped ZnO Powders
• Nonradiative Transition Processes Observed from Photoacoustic Spectra of ZnO Thin Films Fabricated by Pulsed Laser Deposition
• Photoacoustic Spectra from Co Doped ZnO with Different Grain or Cluster Sizes
• Estimation of Schottky Contacts to Porous Si by Photoacoustic Spectroscopy
• Submicron-Size Fabrication of Bi_2Sr_2CaCu_2O_x Thin Films by Utilizing Facet Growth
• Anisotropic Transport Properties in Twin-Free Bi_2Sr_2CaCu_2O_x Thin Films on Tilted LaAlO_3 (001) Substrates
• Distributions of Interface States and Bulk Traps in ZnO Varistors
• Development of Structural Analysis Method Based on Reverse Monte Carlo Simulation and Its Application to Catalytic Chemical Vapor Deposition Hydrogenated Amorphous Silicon
• The Measurement of Annealing Cycle Effect of Si-Ge-Au Amorphous Thin Film with Anomalously Large Thermoelectric Power by Using Photoacoustic Spectroscopy
• 宇宙マイクロ・ナノ工学とシリコンナノサテライト連携研究計画 (特集 宇宙高温工学)
• 先端プラズマエッチングプロセスのモデリングと体系化
• ULSIデバイス作製プロセスにおけるプラズマ-固体表面相互作用
• X-Ray Photoelectron Spectroscopy Study of Hetero-Interface between Manganese Pnictide and Mn-Zn Ferrite
• Epitaxial Growth of InAs on Single-Crystalline Mn-Zn Ferrite Substrates
• 27aW-12 Electronic structures of the CDW phase of in linear chains on Si(111)
• Thermal Desorption Spectroscopy of (Ba, Sr)TiO_3 Thin Films Prepared by Chemical Vapor Deposition
• Preparation of (Ba, Sr)TiO_3 Thin Films by Chemical Vapor Deposition Using Liquid Sources
• Step Coverage and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)_2 ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Effect of Impurity at SiO_2/Si Interface on 2D Hole Gas
• Generalized Grazing Incidence-Angle X-Ray Diffraction Studies on InAs Quantum Dots on Si(100) Substrates
• The Effect of Surface Cleaning by Wet Treatments and Ultra High Vacuum Annealing for Ohmic Contact Formation of P-Type GaN
• Spin State Analysis of Epitaxial Mn Compound Films Using High Resolution X-Ray Fluorescence
• Chemical States of Piled-up Phosphorus and Arsenic Atoms at the SiO2/Si Interface (Proceedings of the Second International Conference on SRMS(Synchrotron Radiation in Materials Science)(2))
• Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up
• Characterization of Phosphorus Pile-Up at the SiO_2/Si Interface
• Annealing Temperature Dependence of the Amorphous Structure of Amorphous Si-Ge-Au Thin Films
• Anomalous Large Thermoelectric PoWer on Heavily B-Doped SiGe Thin Films with Thermal Annealing : Structure and Mechanical and Thermal Properties of Condensed Matter
• Evaluation of Sb_2O_3-Doped ZnO Varistors by Photoacoustic Spectroscopy
• Size Effects on Photoacoustic Spectra for GaAs Fine Powder
• Photoacoustic Spectra on the Bi or Pr Doped ZnO Varistors
• Characterization of Interface States in Degraded ZnO Varistors(Electrical Properties of Condensed Matter)
• Pinning Effect by Interface States in Pr-type ZnO Varistors : Electrical Properties of Condensed Matter
• Photoacoustic Spectra on the ZnO and CdO Compound Semiconductor
• In Situ Fourier Transform Infrared Measurements of Si Surface and Bulk Plasmas in Cl_2/O_2 and HBr/O_2 Electron Cyclotron Resonance Plasma Etching: Influence of Oxygen on Reaction Products
• In situ Monitoring of Product Species in Plasma Etching by Fourier Transform Infrared Absorption Spectroscopy
• Anisotropic Etching of n^+-Polysilicon Using Beam Plasmas Generated by Gas Puff Plasma Sources
• Chemical Kinetics of Chlorine in Electron Cyclotron Resonance Plasma Etching of Si ( Plasma Processing)
• Multicusp Electron-Cyclotron-Resonance Plasma Source Working with Microwaves Radially Injected through an Annular Slit
• Measurement of the Cl Atom Concentration in RF Chlorine Plasmas by Two-Photon Laser-Induced Fluorescence
• Plasma Chemical View of Magnetron and Reactive Ion Etching of Si with Cl_2 : Etching and Deposition Technology
• Plasma Chemical View of Magnetron and Reactive Ion Etching of Si with Cl_2
• Spin Polarization and Magneto-Coulomb Oscillations in Ferromagnetic Single Electron Devices
• Magneto-Coulomb Oscillation in Ferromagnetic Single Electron Transistors
• Enhanced Magnetic Valve Effect and Magneto-Coulomb Oscillations in Ferromagnetic Single Electron Transistor
• Magnetoresistance of Ni/NiO/Co Small Tunnel Junctions in Coulomb Blockade Regime
• A New Fabrication Method for Ultra Small Tunnel Junctions
• Photoacoustic Spectra of ZnO-Co Alloy Semiconductors
• The Study of Interface States in ZnO Varistors by Injection Pulse Width Dependence of Transient Response
• Modal-Matching Analysis of Loss in Bent Graded-Index Optical Slab Waveguides
• Coupled-Mode Analysis of Loss in Bent Single-Mode Optical Fibers
• Coupled-Mode Analysis of Bent Planar Waveguides with Finite Claddings
• Pure Bend Loss of TM Modes in Slab Optical Waveguides Bounded by Magnetic Walls
• Pure Bend Loss Evaluation of Slab Waveguide with Finite Claddings by Coupled-Mode Theory
• Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
• Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
• Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO_3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)
• Mechanisms of X-Ray Radiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors
• Influence of Buffer Layers and Barrier Metals on Properties of (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition
• Mechanisms of Synchrotron X-Ray Irradiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors
• A Mass Spectrometric Study of Reaction Mechanisms in Chemical Vapor Deposition of (Ba, Sr)TiO_3 Films
• (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition on Ru Electrodes
• Reaction Mechanism and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition
• Surface Morphologies and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition
• Dynamic Terminations for Low-Power High-Speed Chip Interconnection in Portable Equipment
• Reaction Mechanism of Chemical Vapor Deposition Using Tetraethylorthosilicate and Ozone at Atmospheric Pressure
• Photoacoustic Spectra for Porous Silicon Using Piezoelectric Transducer and Microphone
• Chopping Frequency Dependence of Photoacoustic Spectrum in Porous Silicon
• Amplitude and Phase Signals of the Photothermal Deflection Images
• Thermoelectric Properties of and Dopant Distribution in SiC Thin Films
• Photoacoustic Spectrum and Surface Morphology of Porous Silicon
• Band Gap of Porous Silicon Estimated by Photoacoustic Spectra
• Evaluation of ZnO Varistors by Photoacoustic Spectroscopy
• Improved Alignment Accuracy Using Lens-Distortion Correction for Electron-Beam Lithography in Mix-and-Match with an Optical Stepper
• Gate Voltage Dependence of the Resistance of a Two-Dimensional Array of Small Tunnel Junctions ( Quantum Dot Structures)
• Chemical Potential Dependence of Resistance of Two-Dimensional Array of Small Tunnel Junctions
• The Study of the Origin of the Anomalously Large Thermoelectric Power of Si/Ge Superlattice Thin Film
• 超小型高周波イオン推進機におけるプラズマ源の周波数依存性
• 電気的手法を用いた物理的Si基板ダメージのプラズマプロセス依存性の検討(プロセス科学と新プロセス技術)
• 物理的プラズマダメージによるMOSFETバラツキ増大予測のための包括モデル(プロセス科学と新プロセス技術)
• マイクロプラズマスラスターの研究開発
• 宇宙マイクロ・ナノ工学とシリコンナノサテライト連携研究計画
• 古典的分子動力学計算による物理的プラズマダメージ形成機構の検討 : Fin型MOSFETでの欠陥生成機構(プロセス科学と新プロセス技術)
• プラズマチャージングダメージがMOSFETのRandom Telegraph Noise特性に及ぼす影響(プロセス科学と新プロセス技術)

もっと見る 閉じる

スポンサーリンク