ULSIデバイス作製プロセスにおけるプラズマ-固体表面相互作用

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概要

• 論文の詳細を見る
• 応用物理学会の論文
• 1999-05-10

著者

• 斧 高一

  京都大学大学院工学研究科

• 斧 高一

  京都大学大学院工学研究科航空宇宙工学専攻

関連論文

• 2.ドライエッチングのモデルとその実験検証(ドライエッチングの科学と技術の新局面)
• 4.高誘電率(High-k)材料のドライエッチング(ドライエッチングの科学と技術の新局面)
• 1.はじめに(ドライエッチングの科学と技術の新局面)
• 8.おわりに(ドライエッチングの科学と技術の新局面)
• 最近の展望 マイクロプラズマスラスター
• 第58回気体エレクトロニクス会議(58th Gaseous Electronics Conference)
• 誘導結合型フルオロカｰボンプラズマを用いた高誘電率HfO_2薄膜のエッチング
• 半導体プラズマプロセスシミュレーションとTCAD
• プラズマCVDと溶媒処理を用いたフルオロカーボン系多孔質構造Low-K薄膜の作成
• Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
• Si ドライエッチング技術
• 3.1 プラズマエッチング : 3. プラズマプロセス装置におけるプラズマ・表面相互作用(プラズマ・表面相互作用) : 多様なPSI現象
• 先端プラズマエッチングプロセスのモデリングと体系化
• ULSIデバイス作製プロセスにおけるプラズマ-固体表面相互作用
• X-Ray Photoelectron Spectroscopy Study of Hetero-Interface between Manganese Pnictide and Mn-Zn Ferrite
• Epitaxial Growth of InAs on Single-Crystalline Mn-Zn Ferrite Substrates
• Thermal Desorption Spectroscopy of (Ba, Sr)TiO_3 Thin Films Prepared by Chemical Vapor Deposition
• Effect of Impurity at SiO_2/Si Interface on 2D Hole Gas
• Generalized Grazing Incidence-Angle X-Ray Diffraction Studies on InAs Quantum Dots on Si(100) Substrates
• The Effect of Surface Cleaning by Wet Treatments and Ultra High Vacuum Annealing for Ohmic Contact Formation of P-Type GaN
• Spin State Analysis of Epitaxial Mn Compound Films Using High Resolution X-Ray Fluorescence
• Chemical States of Piled-up Phosphorus and Arsenic Atoms at the SiO2/Si Interface (Proceedings of the Second International Conference on SRMS(Synchrotron Radiation in Materials Science)(2))
• Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up
• Characterization of Phosphorus Pile-Up at the SiO_2/Si Interface
• In Situ Fourier Transform Infrared Measurements of Si Surface and Bulk Plasmas in Cl_2/O_2 and HBr/O_2 Electron Cyclotron Resonance Plasma Etching: Influence of Oxygen on Reaction Products
• Spin Polarization and Magneto-Coulomb Oscillations in Ferromagnetic Single Electron Devices
• Magneto-Coulomb Oscillation in Ferromagnetic Single Electron Transistors
• Enhanced Magnetic Valve Effect and Magneto-Coulomb Oscillations in Ferromagnetic Single Electron Transistor
• Magnetoresistance of Ni/NiO/Co Small Tunnel Junctions in Coulomb Blockade Regime
• A New Fabrication Method for Ultra Small Tunnel Junctions
• Modal-Matching Analysis of Loss in Bent Graded-Index Optical Slab Waveguides
• Coupled-Mode Analysis of Loss in Bent Single-Mode Optical Fibers
• Coupled-Mode Analysis of Bent Planar Waveguides with Finite Claddings
• Pure Bend Loss of TM Modes in Slab Optical Waveguides Bounded by Magnetic Walls
• Pure Bend Loss Evaluation of Slab Waveguide with Finite Claddings by Coupled-Mode Theory
• Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
• Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
• Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO_3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)
• Mechanisms of X-Ray Radiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors
• Influence of Buffer Layers and Barrier Metals on Properties of (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition
• Mechanisms of Synchrotron X-Ray Irradiation-Induced Damage in (Ba, Sr)TiO_3 Capacitors
• A Mass Spectrometric Study of Reaction Mechanisms in Chemical Vapor Deposition of (Ba, Sr)TiO_3 Films
• (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition on Ru Electrodes
• Reaction Mechanism and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Liquid Source Chemical Vapor Deposition
• Surface Morphologies and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition
• Gate Voltage Dependence of the Resistance of a Two-Dimensional Array of Small Tunnel Junctions ( Quantum Dot Structures)
• Chemical Potential Dependence of Resistance of Two-Dimensional Array of Small Tunnel Junctions
• 超小型高周波イオン推進機におけるプラズマ源の周波数依存性
• 電気的手法を用いた物理的Si基板ダメージのプラズマプロセス依存性の検討(プロセス科学と新プロセス技術)
• 物理的プラズマダメージによるMOSFETバラツキ増大予測のための包括モデル(プロセス科学と新プロセス技術)
• マイクロプラズマスラスターの研究開発
• 宇宙マイクロ・ナノ工学とシリコンナノサテライト連携研究計画

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