Surface Morphologies and Electrical Properties of (Ba, Sr)TiO_3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-09-30

著者

• 斧 高一

  京都大学大学院工学研究科

• Ono K

  Department Of Applied Chemistry The University Of Tokyo

• Ono K

  Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae

• Ono K

  Univ. California Ca Usa

• KAWAHARA Toshio

  Department of Materials Science and Engineering, National Defense Academy

• KAWAHARA Takaaki

  Semiconductor Leading Edge Technologies, Inc.

• YAMAMUKA Mikio

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation

• YUUKI Akimasa

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation

• ONO Kouichi

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation

• Ono K

  The Faculty Of Engineering Ehime University

• Yuuki A

  Semiconductor Research Laboratory Mitsubishi Electric Corporation

• Yuuki Akimasa

  Product Development Laboratory Mitsubishi Electric Corporation

• Yuuki Akimasa

  Semiconductor Research Laboratory Mitsubishi Electric Corporation

• Yamamuka M

  Mitsubishi Electric Corp. Hyogo Jpn

• Kawahara T

  Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn

• Kawahara T

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Kawahara Takaaki

  Semiconductor Leading Edge Technologies Inc.

• Ono Kouichi

  Semiconductor Research Laboratory Mitsubishi Electric Corporation

• KAWAHARA Takaaki

  Semiconductor Leading Edge Technologies

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