A Mass Spectrometric Study of Reaction Mechanisms in Chemical Vapor Deposition of (Ba, Sr)TiO_3 Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-04-30

著者

• 斧 高一

  京都大学大学院工学研究科

• Ono K

  Department Of Applied Chemistry The University Of Tokyo

• Ono K

  Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae

• Ono K

  Univ. California Ca Usa

• KAWAHARA Toshio

  Department of Materials Science and Engineering, National Defense Academy

• YAMAMUKA Mikio

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Ono Kouichi

  Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae

• Ono K

  The Faculty Of Engineering Ehime University

• Yamamuka M

  Mitsubishi Electric Corp. Hyogo Jpn

• Yamamuka Mikio

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kawahara T

  Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn

• KAWAHARA Takaaki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• HORIKAWA Tsuyoshi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Horikawa Tsuyoshi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kawahara T

  Faculty Of Technology Tokyo University Of Agriculture And Technology

• Ono Kouichi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Kawahara Takaaki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

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