Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-04-15
著者
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斧 高一
京都大学大学院工学研究科
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斧 高一
京大 大学院工学研究科
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ONO Katsuji
Fujitsu Laboratories Ltd.
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KOUSAKA Hiroyuki
Department of Mechanical Science and 6ngineering, Nagoya University
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Ono K
Department Of Applied Chemistry The University Of Tokyo
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Ono K
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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Ono K
Univ. California Ca Usa
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Ono K
The Faculty Of Engineering Ehime University
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Kousaka Hiroyuki
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Ono Kouichi
Department Of Aeronautical Engineering Faculty Of Engineering Kyoto University
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