Molecular-Dynamics-Based Profile Evolution Simulation for Sub-10-nm Si Processing Technology
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-11-25
著者
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OHTA Hiroaki
Materials Department, University of California
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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TSUDA Hirotaka
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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