Numerical Study on Si Etching by Monatomic Br+/Cl+ Beams and Diatomic Br2+/Cl2+/HBr+ Beams
スポンサーリンク
概要
- 論文の詳細を見る
Classical molecular dynamics simulations revealed a new relationship between Si etching by monatomic (Br+/Cl+) beams and that by diatomic (Br2+/Cl2+/HBr+) beams. The etching characteristics by $x$ eV Br+ (or Cl+) bombardment were identical to those by $2x$ eV Br2+ (or Cl2+) bombardment. This simple relationship, combined with the previous result that the effect of H in HBr+ bombardment could be neglected and that the yields of Si by HBr+ are equal to those by Br+ in the high-energy region (more than 100 eV), is beneficial for estimating total etch rates for arbitrary compositions of ions in HBr/Cl2 plasmas.
- 2009-07-25
著者
-
Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
-
Ono Kouichi
Department Of Aeronautical Engineering Faculty Of Engineering Kyoto University
-
Ono Kouichi
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan
-
Ohta Hiroaki
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan
-
Nagaoka Tatsuya
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan
関連論文
- Risk factors associated with preterm delivery in women with pregestational diabetes
- Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
- Effects of KRN633, an Inhibitor of Vascular Endothelial Growth Factor Receptor-2 Tyrosine Kinase, on Vascular Development of Placenta and Fetus of Mid Pregnancy in Mice
- Effect of Estriol on Bone Loss in Postmenopausal Japanese Women : A Multicenter Prospective Open Study
- Absolute height reduction and percent height ratio of the vertebral body in incident fracture in Japanese women
- Long-term effects on bone mineral density and bone metabolism of 6 months' treatment with gonadotropin-releasing hormone analogues in Japanese women : comparison of buserelin acetate with leuprolide acetate
- Vaginal Symptoms in Japanese Postmenopausal Women : These Characteristics and the Effects of Hormone Replacement Therapy
- Effects of Counseling on Climacteric Symptoms in Japanese Postmenopausal Women
- Guidelines on the use of biochemical markers of bone turnover in osteoporosis (2001)
- Efficacy and tolerability of once-weekly administration of 17.5mg risedronate in Japanese patients with involutional osteoporosis : a comparison with 2.5-mg once-daily dosage regimen
- Arg124Cys Mutation of the βig-h3 Gene in a Japanese Family With Lattice Corneal Dystrophy Type I
- P-IS-70 Recurrent Hyperreactio Luteinalis in Spontaneous Singleton Pregnancy(Perinatology 1,Group 106,International Session)
- Performance of Straight-Through-Type Labyrinth for a Low-Pressure Axial Flow Fan with Outer Ring
- Validation of the Japanese Osteoporosis Quality of Life Questionnaire
- The impact of lifestyle factors on serum 25-hydroxyvitamin D levels : a cross-sectional study in Japanese women aged 19-25 years
- A Comparative Study of Plasma Source-Dependent Charging Polarity in MOSFETs with High-k and SiO_2 Gate Dielectrics
- Quantitative Characterization of Plasma-Induced Defect Generation Process in Exposed Thin Si Surface Layers
- Impact of dietary intake, education, and physical activity on bone mineral density among North Indian women
- Effect of physical activity and nutrition on bone mineral density in young Japanese women
- Bisphosphonate-related osteonecrosis of the jaw : position paper from the Allied Task Force Committee of Japanese Society for Bone and Mineral Research, Japan Osteoporosis Society, Japanese Society of Periodontology, Japanese Society for Oral and Maxillof
- Stillborn baby with partial monosomy of the short arm of chromosome 5 and partial trisomy of the short arm of chromosome 20
- Characteristics of Vortex Chamber Oscillation Device
- Enzyme Histochemical Studies on Alkaline Phosphatase in Endometrial Glandular Cell and Endometrial Cancer
- HEAT-STABLE ALKALINE PHOSPHATASE IN THE NORMAL FEMALE GENITAL ORGAN : WITH SPECIAL REFERENCE TO THE HISTOCHEMICAL HEAT-STABILITY TEST AND L-PHENYLALANINE INHIBITION TEST
- Age-related distribution of bone and skeletal parameters in 1,322 Japanese young women
- Influence of maternal genetic and lifestyle factors on bone mineral density in adolescent daughters : a cohort study in 387 Japanese daughter-mother pairs
- Association between lumber bone mineral density and vascular stiffness as assessed by pulse wave velocity in postmenopausal women
- Possible risk factor for postmenopausal women : Postprandial hypertriglyceridemia
- Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl_2/O_2 Plasmas
- Molecular-Dynamics-Based Profile Evolution Simulation for Sub-10-nm Si Processing Technology
- Selective Etching of High-k Dielectric HfO_2 Films over Si in BCl_3-Containing Plasmas without rf Biasing
- Alpha Fetoprotein Producing Early Gastric Cancer with Metachronous Liver Metastasis : A Report of Two Cases
- T cell activation in abnormal perinatal events
- Characterization of the sugar chain expression of normal term human placental villi using lectin histochemistry combined with immunohistochemistry
- Molecular Dynamics Analysis of the Formation of Surface Roughness during Si Etching in Chlorine-Based Plasmas
- Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in Chlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness
- Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges
- Effect of Impeller Outlet Angle on Performance and Internal Flow of Centrifugal Pump for High-Viscosity Liquids
- Effects of KRN633, an Inhibitor of Vascular Endothelial Growth Factor Receptor-2 Tyrosine Kinase, on Vascular Development of Placenta and Fetus of Mid Pregnancy in Mice
- Atomic-Scale Cellular Model and Profile Simulation of Si Etching: Analysis of Profile Anomalies and Microscopic Uniformity
- Diagnosis of toxic shock syndrome by two different systems : clinical criteria and monitoring of TSST-1-reactive T cells
- Familial correlation of bone mineral density, birth data and lifestyle factors among adolescent daughters, mothers and grandmothers
- The Applicability of Formal Specification to Maintenance of Large-Scale Software
- Molecular Dynamics Evaluation of Thermal Transport in Naked and Oxide-Coated Silicon Nanowires
- The Relationship between shape and Energy Loss of Rectangular Duct Branches Suitable for Production Rationalization
- Clinical features of fetal growth restriction complicated later by preeclampsia
- Design of a pragmatic approach to evaluate the effectiveness of concurrent treatment for the prevention of osteoporotic fractures
- Dr. Soju Kurihara : increased awareness of cytologic diagnosis
- Plasma Formation in a Neutral Gas by a Short-Pulsed, High-Current Electron Beam
- Beam and Plasma Currents in an Injection of a Short-Pulsed, High-Current Electron Beam into Initially-Neutral Gases
- Visible and Ultraviolet High-Intensity Spectral Lines in Electron-Beam-Produced Plasmas
- Regulation of Ankyrin Interaction with CD44 by Protein 4.1 in HeLa Cells
- Villous Adenoma of the Duodenum
- Etching of High-k Dielectric HfO2 Films in BCl3-Containing Plasmas Enhanced with O2 Addition
- Numerical Investigation on Origin of Microscopic Surface Roughness during Si Etching by Chemically Reactive Plasmas
- Novel virtual cytological analysis for the detection of endometrial cancer cells using autoscan fluoromicroscopy
- Numerical Study on Si Etching by Monatomic Br+/Cl+ Beams and Diatomic Br2+/Cl2+/HBr+ Beams
- Molecular Dynamics Simulation of Si Etching by Off-Normal Cl+ Bombardment at High Neutral-to-Ion Flux Ratios
- Molecular-Dynamics-Based Profile Evolution Simulation for Sub-10-nm Si Processing Technology
- Effect of Clearance Ratio in the Use of Open-Type Centrifugal Pump for Pumping of High-Viscosity Liquids
- UV〜Near-IR Laser Lines in Electron-Beam-Produced Rare Gas Plasmas
- Effects of Mask Pattern Geometry on Plasma Etching Profiles
- Laser Action of Ionized and Neutral Atomic Lines in Electron-Beam-Produced Rare Gas Plasmas
- On Early-Stage-Excitation Processes of KrII and XeII Lines in Pulsed-Electron-Beam Produced Plasmas
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl2/O2 Plasmas
- An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching
- Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence
- Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster
- An Improvement of Stillinger–Weber Interatomic Potential Model for Reactive Ion Etching Simulations
- Microwave-Excited High-Density Plasma Column Sustained along Metal Rod at Negative Voltage