斧 高一 | 京大 大学院工学研究科
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概要
関連著者
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斧 高一
京大 大学院工学研究科
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ONO Katsuji
Fujitsu Laboratories Ltd.
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Ono K
Univ. California Ca Usa
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Ono K
The Faculty Of Engineering Ehime University
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Ono K
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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斧 高一
京都大学大学院工学研究科
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Ono K
Department Of Applied Chemistry The University Of Tokyo
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斧 高一
京都大学大学院工学研究科航空宇宙工学専攻
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斧 高一
京都大学大学院 工学研究科
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高橋 和生
京都工芸繊維大
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高橋 和生
京都大学大学院工学研究科
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高橋 和生
京都大学大学院 工学研究科
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堀田 昌志
山ロ大学
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節原 裕一
国立大学法人大阪大学接合科学研究所
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江利口 浩二
京都大学大学院工学研究科
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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江利口 浩二
京大
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節原 裕一
京都大学大学院 工学研究科
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KAWAHARA Toshio
Department of Materials Science and Engineering, National Defense Academy
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YAMAMUKA Mikio
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation:(present Address)department Of Ae
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堀田 昌志
山口大
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塚田 昌志
Graduate School Of Science And Engineering Yamaguchi University
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Hotta M
Ehime Univ. Matsuyama‐shi Jpn
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Hotta M
Graduate School Of Science And Engineering Yamaguchi University
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Sato T
Research Center For Integrated Quantum Electronics (rciqe) And Graduate School Of Information Scienc
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Yamamuka M
Mitsubishi Electric Corp. Hyogo Jpn
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Yamamuka Mikio
Advanced Technology R&d Center Mitsubishi Electric Corporation
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MIRIANASHVILI Maria
California Eastern Laboratories
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Hotta Masashi
Faculty of Engineering, Ehime University
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Kawahara T
Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn
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KAWAHARA Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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TARUTANI Masayoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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HORIKAWA Tsuyoshi
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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MATSUNO Shigeru
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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SATO Takehiko
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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UCHIKAWA Fusaoki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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Matsuno Shigeru
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Horikawa Tsuyoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Tarutani Masayoshi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kawahara T
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Uchikawa F
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Uchikawa Fusaoki
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Ono Kouichi
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Sato Takehiko
Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan
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Kawahara Takaaki
Advanced Technology R&D Center, Mitsubishi Electric Corporation
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KOUSAKA Hiroyuki
Department of Mechanical Science and 6ngineering, Nagoya University
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OSANO Yugo
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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三田村 崇司
京都大学大学院 工学研究科
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Osano Yugo
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Ootuka Youiti
Cryogenic Center University Of Tokyo
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Ootuka Youiti
Cryogenic Center The University Of Tokyo
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HOTTA Masashi
Department of Electrical & Electronic Engineering, Yamaguchi University
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Ono Kazuo
The First, Department of Internal Medicine, Fukushima Medical College
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SHIMADA Hiroshi
Cryogenic Center, The University of Tokyo
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ONO Kazuo
Department of Surgical Pathology, Wakayama Medical College Hospital
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Shimada H
Department Of Physics Chuo University
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ONO Keiji
Cryogenic Center,University of Tokyo
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Ono Kazuo
The First Department Of Internal Medicine Fukushima Medical College
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Hotta Masashi
The Faculty Of Engineering Ehime University
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Maria MIRIANASHVILI
Department of Electrical and Electronics Engineering, Faculty of Engineering, Ehime University
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MIRIANASHVILI Maria
Department of Electrical and Electronic Engineering, Faculty of Engineering, Ehime University
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Kousaka Hiroyuki
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Ono Kouichi
Department Of Aeronautical Engineering Faculty Of Engineering Kyoto University
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Ono Kazuo
Department Of Electrical And Electronic Engineering Faculty Of Engineering Ehime Univetsity
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Ono Kazuo
Department Of Biotechnology Faculty Of Engineering Kansai University
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鷹尾 祥典
京都大学
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Shimada Hiroshi
Cryogenic Center Univesity Of Tokyo
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HOTTA Masashi
Department Electronics Engineering, Ehime University
著作論文
- 2.ドライエッチングのモデルとその実験検証(ドライエッチングの科学と技術の新局面)
- 4.高誘電率(High-k)材料のドライエッチング(ドライエッチングの科学と技術の新局面)
- 1.はじめに(ドライエッチングの科学と技術の新局面)
- 8.おわりに(ドライエッチングの科学と技術の新局面)
- 最近の展望 マイクロプラズマスラスター
- 第58回気体エレクトロニクス会議(58th Gaseous Electronics Conference)
- An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching
- マイクロプラズマスラスターの研究開発 (特集 宇宙高温工学)
- 誘導結合型フルオロカーボンプラズマを用いた高誘電率HfO_2薄膜のエッチング
- 半導体プラズマプロセスシミュレーションとTCAD
- プラズマCVDと溶媒処理を用いたフルオロカーボン系多孔質構造Low-K薄膜の作成
- Numerical Analysis of the Electromagnetic Fields in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
- Si ドライエッチング技術
- 3.1 プラズマエッチング : 3. プラズマプロセス装置におけるプラズマ・表面相互作用(プラズマ・表面相互作用) : 多様なPSI現象
- 宇宙マイクロ・ナノ工学とシリコンナノサテライト連携研究計画 (特集 宇宙高温工学)
- 先端プラズマエッチングプロセスのモデリングと体系化
- Spin Polarization and Magneto-Coulomb Oscillations in Ferromagnetic Single Electron Devices
- Modal-Matching Analysis of Loss in Bent Graded-Index Optical Slab Waveguides
- Coupled-Mode Analysis of Loss in Bent Single-Mode Optical Fibers
- Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
- Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2