Osano Yugo | Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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概要
- 同名の論文著者
- Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto Universityの論文著者
関連著者
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Osano Yugo
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Ono Kouichi
Department Of Aeronautical Engineering Faculty Of Engineering Kyoto University
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斧 高一
京大 大学院工学研究科
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ONO Katsuji
Fujitsu Laboratories Ltd.
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Ono K
Univ. California Ca Usa
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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OSANO Yugo
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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Takahashi Kazuo
Department Of Advanced Medical Technology And Development Bml Inc.
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Ono K
The Faculty Of Engineering Ehime University
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Itabashi Naoshi
Central Research Laboratory Hitachi Ltd.
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Mori Masahito
Central Research Laboratory Hitachi Ltd.
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Itabashi Naoshi
Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Osano Yugo
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan
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Mori Masahito
Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
著作論文
- An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl2/O2 Plasmas
- An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching