OSANO Yugo | Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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概要
- Osano Yugoの詳細を見る
- 同名の論文著者
- Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto Universityの論文著者
関連著者
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Ono Kouichi
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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OSANO Yugo
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University
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斧 高一
京大 大学院工学研究科
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Takahashi Kazuo
Department of Electronic Science and Engineering, Kyoto University
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ONO Katsuji
Fujitsu Laboratories Ltd.
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Ono K
Univ. California Ca Usa
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Eriguchi Koji
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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Osano Yugo
Department Of Aeronautics And Astronautics Graduate School Of Engineering Kyoto University
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ITABASHI Naoshi
Central Research Laboratory, Hitachi, Ltd.
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Ono K
The Faculty Of Engineering Ehime University
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MORI Masahito
Central Research Laboratory, Hitachi, Ltd.
著作論文
- An Atomic Scale Model of Multilayer Surface Reactions and the Feature Profile Evolution during Plasma Etching
- A Model Analysis of Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl_2/O_2 Plasmas